Semiconductor Processing Seals For Field-Proven Contamination Control
Purity is critical to high wafer yield, and Kalrez® seals are designed with properties that help reduce contamination from particulates, outgassing and extractables.
Semiconductor Processing Seals
Kalrez® seals for semiconductor processing are field-proven in the manufacture of semiconductor chips.
They can help extend planned maintenance intervals, and thereby lower long-term cost of ownership, in a wide range of semiconductor processes. In a number of fabrication customer evaluations, Kalrez®seals exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers, in both static and dynamic sealing applications.
Operations Improvements
Kalrez® seals can help improve semiconductor manufacturing in a range of wafer-fabricating operations, including:
- Deposition
- Etch
- Ash/strip
- Thermal
- Wet
Better Performance for Spansion
Spansion, the largest provider of flash memory solutions, turned to DuPont for material options that would produce longer seal life with reduced particle generation. High particle count and leaks from seal erosion and compression set caused seal issues in multiple processes. Kalrez® 9100 parts exhibited significantly less seal erosion, reduced particle generation, and provided better elastic recovery characteristics. View Spansion Semiconductor O-rings Case Study
A Proven Leader
When IMEC tested Kalrez® 9100 seals versus incumbent seals in an isolation valve and top nozzle position, the 9100 seals appeared undamaged and exhibited no sign of cracking after 5000 cycles.
These results inspired the international research center IMEC in Belgium to change the perfluoroelastomer seals on all positions to Kalrez® 9100 seals. View IMEC Case Study
Latest Product Offering Targeted for Semicon Fabrication
The latest perfluoroelastomer offering from DuPont, Kalrez® 9600 provides longer seal life by offering enhanced performance properties in an array of aggressive and emerging high-temperature plasma applications.
Kalrez® 9600 is an innovative product for the semiconductor fabricating industry and builds on the performance of the market leaders, Kalrez® 9100 and Kalrez® 9500. It offers lower defectivity and longer seal life with better sealing functionality at higher temperatures in vacuum plasma processes.
Targeted applications for Kalrez® 9600 include those especially suited to plasma deposition applications such as atomic layer deposition and chemical vapor deposition, as well as etch processes used to fabricate next-gen chips in the semiconductor industry.
Featured
-
Seal Outgassing Test Results
Evaluation and comparison of outgassing for three different classes of elastomeric seal materials used in semiconductor process environments using DuPont test methodology.
INFORMATION & IDEAS
-
Elastomer Chemical Resistance Guide
-
Chemical Resistant Elastomers
DuPont has a portfolio of chemical resistant elastomers and thermoplastics to match a broad spectrum of challenges – from aggressive automotive fuels to custom industrial equipment.
-
High Performance Polymers
-
Kalrez® Composite Seals
For standard and complex composite seal applications, Kalrez® perfluoroelastomer parts can be designed and molded to your specifications. DuPont has proprietary technology to bond Kalrez® to a variety of materials, such as metal or plastic bonding.
-
Seal Outgassing Test Results
Evaluation and comparison of outgassing for three different classes of elastomeric seal materials used in semiconductor process environments using DuPont test methodology.
CASE STUDIES
-
Sealing Collaboration Pays Dividends in Chamber Cleaning
Chamber cleaning with NF3 / O2 plasma increased maintenance at Spansion due to seal erosion. Kalrez® 9100 parts improved productivity and reduced cost-of-ownership. Kalrez® 9100 parts were successfully qualified in both thin films and dry etch tools.