Kalrez® Seals for Semiconductor Processing

Semiconductor Processing Seals For Field-Proven Contamination Control

Purity is critical to high wafer yield, and Kalrez® seals are designed with properties that help reduce contamination from particulates, outgassing and extractables.

Kalrez® seals for semiconductor processing are field-proven in the manufacture of semiconductor chips.

They can help extend planned maintenance intervals, and thereby lower long-term cost of ownership, in a wide range of semiconductor processes. In a number of fabrication customer evaluations, Kalrez® seals exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers, in both static and dynamic sealing applications.  

Operations Improvements

Kalrez® seals can help improve semiconductor manufacturing in a range of wafer-fabricating operations, including:

  • Deposition
  • Etch
  • Ash/strip
  • Thermal
  • Wet

Better Performance for Spansion

Spansion, the largest provider of flash memory solutions, turned to DuPont for material options that would produce longer seal life with reduced particle generation. High particle count and leaks from seal erosion and compression set caused seal issues in multiple processes. Kalrez® 9100 parts exhibited significantly less seal erosion, reduced particle generation, and provided better elastic recovery characteristics. View Spansion Semiconductor O-rings Case Study

A Proven Leader

When IMEC tested Kalrez® 9100 seals versus incumbent seals in an isolation valve and top nozzle position, the 9100 seals appeared undamaged and exhibited no sign of cracking after 5000 cycles.

These results inspired the international research center IMEC in Belgium to change the perfluoroelastomer seals on all positions to Kalrez® 9100 seals. View IMEC Case Study